10/6/2011	12:33:15 AM	Main Vac valve closed
10/6/2011	12:33:24 AM	Main Vac valve opened
10/6/2011	12:58:43 AM	Main Vac valve closed
10/6/2011	1:02:05 AM	Tube furnace set to 0
10/6/2011	1:43:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	1:43:34 AM	Recipe started at 1:43 AM
10/6/2011	1:43:34 AM	Helium valve closed
10/6/2011	1:43:34 AM	H2 valve closed
10/6/2011	1:43:34 AM	BCl3 valve closed
10/6/2011	1:43:34 AM	PH3 valve closed
10/6/2011	1:43:34 AM	SiCl4 pre valve closed
10/6/2011	1:43:34 AM	SiCl4 post valve closed
10/6/2011	1:43:34 AM	Main Vac valve closed
10/6/2011	1:43:34 AM	Bubbler valve closed
10/6/2011	1:43:34 AM	Bypass valve opened
10/6/2011	1:43:34 AM	Helium MFC set to  0.000000
10/6/2011	1:43:34 AM	H2 MFC set to  0.000000
10/6/2011	1:43:34 AM	BCl3 MFC set to  0.000000
10/6/2011	1:43:34 AM	PHl3 MFC set to  0.000000
10/6/2011	1:43:34 AM	SiCl4 MFC set to  0.000000
10/6/2011	1:43:34 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	1:43:34 AM	Tube furnace set to 0
10/6/2011	1:45:12 AM	Helium valve closed
10/6/2011	1:45:12 AM	H2 valve closed
10/6/2011	1:45:12 AM	BCl3 valve closed
10/6/2011	1:45:12 AM	PH3 valve closed
10/6/2011	1:45:12 AM	SiCl4 pre valve closed
10/6/2011	1:45:12 AM	SiCl4 post valve closed
10/6/2011	1:45:12 AM	Main Vac valve closed
10/6/2011	1:45:12 AM	Bubbler valve closed
10/6/2011	1:45:12 AM	Bypass valve opened
10/6/2011	1:45:12 AM	Helium MFC set to  0.000000
10/6/2011	1:45:12 AM	H2 MFC set to  0.000000
10/6/2011	1:45:12 AM	BCl3 MFC set to  0.000000
10/6/2011	1:45:12 AM	PHl3 MFC set to  0.000000
10/6/2011	1:45:12 AM	SiCl4 MFC set to  0.000000
10/6/2011	1:45:12 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	1:45:12 AM	Tube furnace set to 0
10/6/2011	1:45:37 AM	Helium valve closed
10/6/2011	1:45:37 AM	H2 valve closed
10/6/2011	1:45:37 AM	BCl3 valve closed
10/6/2011	1:45:37 AM	PH3 valve closed
10/6/2011	1:45:37 AM	SiCl4 pre valve closed
10/6/2011	1:45:37 AM	SiCl4 post valve closed
10/6/2011	1:45:37 AM	Bypass valve closed
10/6/2011	1:45:37 AM	Bubbler valve closed
10/6/2011	1:45:37 AM	Main Vac valve opened
10/6/2011	1:45:37 AM	Helium MFC set to  0.000000
10/6/2011	1:45:37 AM	H2 MFC set to  0.000000
10/6/2011	1:45:37 AM	BCl3 MFC set to  0.000000
10/6/2011	1:45:37 AM	PHl3 MFC set to  0.000000
10/6/2011	1:45:37 AM	SiCl4 MFC set to  0.000000
10/6/2011	1:45:37 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	1:45:37 AM	Tube furnace set to 0
10/6/2011	1:45:38 AM	Run finished at 1:45 AM
10/6/2011	1:45:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	1:45:47 AM	Tube furnace set to 150
10/6/2011	1:50:20 AM	Main Vac valve closed
10/6/2011	1:50:23 AM	SiCl4 post valve opened
10/6/2011	1:50:26 AM	Bypass valve opened
10/6/2011	1:51:12 AM	Bypass valve closed
10/6/2011	1:51:12 AM	Main Vac valve opened
10/6/2011	2:05:19 AM	Tube furnace set to 0
10/6/2011	2:05:22 AM	Main Vac valve closed
10/6/2011	2:05:51 AM	SiCl4 post valve closed
10/6/2011	2:55:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	2:55:22 AM	Recipe started at 2:55 AM
10/6/2011	2:55:22 AM	Helium valve closed
10/6/2011	2:55:22 AM	H2 valve closed
10/6/2011	2:55:22 AM	BCl3 valve closed
10/6/2011	2:55:22 AM	PH3 valve closed
10/6/2011	2:55:22 AM	SiCl4 pre valve closed
10/6/2011	2:55:22 AM	SiCl4 post valve closed
10/6/2011	2:55:22 AM	Main Vac valve closed
10/6/2011	2:55:22 AM	Bubbler valve closed
10/6/2011	2:55:22 AM	Bypass valve opened
10/6/2011	2:55:22 AM	Helium MFC set to  0.000000
10/6/2011	2:55:22 AM	H2 MFC set to  0.000000
10/6/2011	2:55:22 AM	BCl3 MFC set to  0.000000
10/6/2011	2:55:22 AM	PHl3 MFC set to  0.000000
10/6/2011	2:55:22 AM	SiCl4 MFC set to  0.000000
10/6/2011	2:55:22 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	2:55:22 AM	Tube furnace set to 0
10/6/2011	2:57:23 AM	Helium valve closed
10/6/2011	2:57:23 AM	H2 valve closed
10/6/2011	2:57:23 AM	BCl3 valve closed
10/6/2011	2:57:23 AM	PH3 valve closed
10/6/2011	2:57:23 AM	SiCl4 pre valve closed
10/6/2011	2:57:23 AM	SiCl4 post valve closed
10/6/2011	2:57:23 AM	Main Vac valve closed
10/6/2011	2:57:23 AM	Bubbler valve closed
10/6/2011	2:57:23 AM	Bypass valve opened
10/6/2011	2:57:23 AM	Helium MFC set to  0.000000
10/6/2011	2:57:23 AM	H2 MFC set to  0.000000
10/6/2011	2:57:23 AM	BCl3 MFC set to  0.000000
10/6/2011	2:57:23 AM	PHl3 MFC set to  0.000000
10/6/2011	2:57:23 AM	SiCl4 MFC set to  0.000000
10/6/2011	2:57:23 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	2:57:23 AM	Tube furnace set to 0
10/6/2011	2:58:18 AM	Helium valve closed
10/6/2011	2:58:18 AM	H2 valve closed
10/6/2011	2:58:18 AM	BCl3 valve closed
10/6/2011	2:58:18 AM	PH3 valve closed
10/6/2011	2:58:18 AM	SiCl4 pre valve closed
10/6/2011	2:58:18 AM	SiCl4 post valve closed
10/6/2011	2:58:18 AM	Bypass valve closed
10/6/2011	2:58:18 AM	Bubbler valve closed
10/6/2011	2:58:18 AM	Main Vac valve opened
10/6/2011	2:58:18 AM	Helium MFC set to  0.000000
10/6/2011	2:58:18 AM	H2 MFC set to  0.000000
10/6/2011	2:58:18 AM	BCl3 MFC set to  0.000000
10/6/2011	2:58:18 AM	PHl3 MFC set to  0.000000
10/6/2011	2:58:18 AM	SiCl4 MFC set to  0.000000
10/6/2011	2:58:18 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	2:58:18 AM	Tube furnace set to 0
10/6/2011	2:58:19 AM	Run finished at 2:58 AM
10/6/2011	2:58:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	2:58:23 AM	Main Vac valve closed
10/6/2011	2:58:24 AM	SiCl4 post valve opened
10/6/2011	2:58:31 AM	Main Vac valve opened
10/6/2011	3:18:01 AM	Tube furnace set to 120
10/6/2011	3:25:14 AM	Main Vac valve closed
10/6/2011	3:25:32 AM	Bypass valve opened
10/6/2011	3:26:58 AM	Bypass valve closed
10/6/2011	3:26:58 AM	Main Vac valve opened
10/6/2011	3:27:32 AM	SiCl4 MFC set to  15.000000
10/6/2011	3:27:34 AM	SiCl4 pre valve opened
10/6/2011	3:27:35 AM	SiCl4 pre valve closed
10/6/2011	3:27:52 AM	Tube furnace set to 130
10/6/2011	3:27:56 AM	Tube furnace set to 140
10/6/2011	3:28:00 AM	SiCl4 MFC set to  10.000000
10/6/2011	3:28:06 AM	SiCl4 pre valve opened
10/6/2011	3:28:14 AM	SiCl4 pre valve closed
10/6/2011	3:28:21 AM	SiCl4 MFC set to  15.000000
10/6/2011	3:28:21 AM	SiCl4 pre valve opened
10/6/2011	3:28:30 AM	SiCl4 pre valve closed
10/6/2011	3:28:36 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:36:43 AM	Main Vac valve closed
10/6/2011	11:36:56 AM	Main Vac valve opened
10/6/2011	11:37:30 AM	SiCl4 post valve closed
10/6/2011	11:38:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/6/2011	11:38:01 AM	Recipe started at 11:38 AM
10/6/2011	11:38:01 AM	Helium valve closed
10/6/2011	11:38:01 AM	H2 valve closed
10/6/2011	11:38:01 AM	BCl3 valve closed
10/6/2011	11:38:01 AM	PH3 valve closed
10/6/2011	11:38:01 AM	SiCl4 pre valve closed
10/6/2011	11:38:01 AM	SiCl4 post valve closed
10/6/2011	11:38:01 AM	Main Vac valve closed
10/6/2011	11:38:01 AM	Bypass valve closed
10/6/2011	11:38:01 AM	Bubbler valve closed
10/6/2011	11:38:01 AM	Helium MFC set to  0.000000
10/6/2011	11:38:01 AM	H2 MFC set to  0.000000
10/6/2011	11:38:01 AM	BCl3 MFC set to  0.000000
10/6/2011	11:38:01 AM	PHl3 MFC set to  0.000000
10/6/2011	11:38:01 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:38:01 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	11:38:01 AM	Tube furnace set to 0
10/6/2011	11:38:04 AM	H2 valve closed
10/6/2011	11:38:04 AM	BCl3 valve closed
10/6/2011	11:38:04 AM	PH3 valve closed
10/6/2011	11:38:04 AM	SiCl4 pre valve closed
10/6/2011	11:38:04 AM	SiCl4 post valve closed
10/6/2011	11:38:04 AM	Main Vac valve closed
10/6/2011	11:38:04 AM	Bypass valve closed
10/6/2011	11:38:04 AM	Bubbler valve closed
10/6/2011	11:38:04 AM	Helium valve opened
10/6/2011	11:38:04 AM	Helium MFC set to  500.000000
10/6/2011	11:38:04 AM	H2 MFC set to  0.000000
10/6/2011	11:38:04 AM	BCl3 MFC set to  0.000000
10/6/2011	11:38:04 AM	PHl3 MFC set to  0.000000
10/6/2011	11:38:04 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:38:04 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	11:38:04 AM	Tube furnace set to 0
10/6/2011	11:39:05 AM	Helium valve closed
10/6/2011	11:39:05 AM	H2 valve closed
10/6/2011	11:39:05 AM	BCl3 valve closed
10/6/2011	11:39:05 AM	PH3 valve closed
10/6/2011	11:39:05 AM	SiCl4 pre valve closed
10/6/2011	11:39:05 AM	SiCl4 post valve closed
10/6/2011	11:39:05 AM	Main Vac valve closed
10/6/2011	11:39:05 AM	Bypass valve closed
10/6/2011	11:39:05 AM	Bubbler valve closed
10/6/2011	11:39:05 AM	Helium MFC set to  0.000000
10/6/2011	11:39:05 AM	H2 MFC set to  0.000000
10/6/2011	11:39:05 AM	BCl3 MFC set to  0.000000
10/6/2011	11:39:05 AM	PHl3 MFC set to  0.000000
10/6/2011	11:39:05 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:39:05 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	11:39:06 AM	Tube furnace set to 0
10/6/2011	11:39:07 AM	Run finished at 11:39 AM
10/6/2011	11:39:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/6/2011	11:47:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	11:47:10 AM	Recipe started at 11:47 AM
10/6/2011	11:47:10 AM	Helium valve closed
10/6/2011	11:47:10 AM	H2 valve closed
10/6/2011	11:47:10 AM	BCl3 valve closed
10/6/2011	11:47:10 AM	PH3 valve closed
10/6/2011	11:47:10 AM	SiCl4 pre valve closed
10/6/2011	11:47:10 AM	SiCl4 post valve closed
10/6/2011	11:47:10 AM	Main Vac valve closed
10/6/2011	11:47:10 AM	Bubbler valve closed
10/6/2011	11:47:10 AM	Bypass valve opened
10/6/2011	11:47:10 AM	Helium MFC set to  0.000000
10/6/2011	11:47:10 AM	H2 MFC set to  0.000000
10/6/2011	11:47:10 AM	BCl3 MFC set to  0.000000
10/6/2011	11:47:10 AM	PHl3 MFC set to  0.000000
10/6/2011	11:47:10 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:47:10 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	11:47:10 AM	Tube furnace set to 0
10/6/2011	11:48:42 AM	Helium valve closed
10/6/2011	11:48:42 AM	H2 valve closed
10/6/2011	11:48:42 AM	BCl3 valve closed
10/6/2011	11:48:42 AM	PH3 valve closed
10/6/2011	11:48:42 AM	SiCl4 pre valve closed
10/6/2011	11:48:42 AM	SiCl4 post valve closed
10/6/2011	11:48:42 AM	Main Vac valve closed
10/6/2011	11:48:42 AM	Bubbler valve closed
10/6/2011	11:48:42 AM	Bypass valve opened
10/6/2011	11:48:42 AM	Helium MFC set to  0.000000
10/6/2011	11:48:42 AM	H2 MFC set to  0.000000
10/6/2011	11:48:42 AM	BCl3 MFC set to  0.000000
10/6/2011	11:48:42 AM	PHl3 MFC set to  0.000000
10/6/2011	11:48:42 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:48:42 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	11:48:42 AM	Tube furnace set to 0
10/6/2011	11:49:09 AM	Helium valve closed
10/6/2011	11:49:09 AM	H2 valve closed
10/6/2011	11:49:09 AM	BCl3 valve closed
10/6/2011	11:49:09 AM	PH3 valve closed
10/6/2011	11:49:09 AM	SiCl4 pre valve closed
10/6/2011	11:49:09 AM	SiCl4 post valve closed
10/6/2011	11:49:09 AM	Bypass valve closed
10/6/2011	11:49:09 AM	Bubbler valve closed
10/6/2011	11:49:09 AM	Main Vac valve opened
10/6/2011	11:49:09 AM	Helium MFC set to  0.000000
10/6/2011	11:49:09 AM	H2 MFC set to  0.000000
10/6/2011	11:49:09 AM	BCl3 MFC set to  0.000000
10/6/2011	11:49:09 AM	PHl3 MFC set to  0.000000
10/6/2011	11:49:09 AM	SiCl4 MFC set to  0.000000
10/6/2011	11:49:09 AM	Bypass solenoid MFC set to  0.000000
10/6/2011	11:49:10 AM	Tube furnace set to 0
10/6/2011	11:49:11 AM	Run finished at 11:49 AM
10/6/2011	11:49:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	11:49:17 AM	Main Vac valve closed
10/6/2011	11:49:18 AM	SiCl4 post valve opened
10/6/2011	11:49:23 AM	Main Vac valve opened
10/6/2011	12:09:57 PM	SiCl4 post valve closed
10/6/2011	12:10:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/6/2011	12:10:12 PM	Recipe started at 12:10 PM
10/6/2011	12:10:12 PM	Helium valve closed
10/6/2011	12:10:12 PM	H2 valve closed
10/6/2011	12:10:12 PM	BCl3 valve closed
10/6/2011	12:10:12 PM	PH3 valve closed
10/6/2011	12:10:12 PM	SiCl4 pre valve closed
10/6/2011	12:10:12 PM	SiCl4 post valve closed
10/6/2011	12:10:12 PM	Main Vac valve closed
10/6/2011	12:10:12 PM	Bypass valve closed
10/6/2011	12:10:12 PM	Bubbler valve closed
10/6/2011	12:10:12 PM	Helium MFC set to  0.000000
10/6/2011	12:10:12 PM	H2 MFC set to  0.000000
10/6/2011	12:10:12 PM	BCl3 MFC set to  0.000000
10/6/2011	12:10:12 PM	PHl3 MFC set to  0.000000
10/6/2011	12:10:12 PM	SiCl4 MFC set to  0.000000
10/6/2011	12:10:12 PM	Bypass solenoid MFC set to  0.000000
10/6/2011	12:10:12 PM	Tube furnace set to 0
10/6/2011	12:10:15 PM	H2 valve closed
10/6/2011	12:10:15 PM	BCl3 valve closed
10/6/2011	12:10:15 PM	PH3 valve closed
10/6/2011	12:10:15 PM	SiCl4 pre valve closed
10/6/2011	12:10:15 PM	SiCl4 post valve closed
10/6/2011	12:10:15 PM	Main Vac valve closed
10/6/2011	12:10:15 PM	Bypass valve closed
10/6/2011	12:10:15 PM	Bubbler valve closed
10/6/2011	12:10:15 PM	Helium valve opened
10/6/2011	12:10:15 PM	Helium MFC set to  500.000000
10/6/2011	12:10:15 PM	H2 MFC set to  0.000000
10/6/2011	12:10:15 PM	BCl3 MFC set to  0.000000
10/6/2011	12:10:15 PM	PHl3 MFC set to  0.000000
10/6/2011	12:10:15 PM	SiCl4 MFC set to  0.000000
10/6/2011	12:10:15 PM	Bypass solenoid MFC set to  0.000000
10/6/2011	12:10:16 PM	Tube furnace set to 0
10/6/2011	12:12:10 PM	Helium valve closed
10/6/2011	12:12:10 PM	H2 valve closed
10/6/2011	12:12:10 PM	BCl3 valve closed
10/6/2011	12:12:10 PM	PH3 valve closed
10/6/2011	12:12:10 PM	SiCl4 pre valve closed
10/6/2011	12:12:10 PM	SiCl4 post valve closed
10/6/2011	12:12:10 PM	Main Vac valve closed
10/6/2011	12:12:10 PM	Bypass valve closed
10/6/2011	12:12:10 PM	Bubbler valve closed
10/6/2011	12:12:10 PM	Helium MFC set to  0.000000
10/6/2011	12:12:10 PM	H2 MFC set to  0.000000
10/6/2011	12:12:10 PM	BCl3 MFC set to  0.000000
10/6/2011	12:12:10 PM	PHl3 MFC set to  0.000000
10/6/2011	12:12:10 PM	SiCl4 MFC set to  0.000000
10/6/2011	12:12:10 PM	Bypass solenoid MFC set to  0.000000
10/6/2011	12:12:10 PM	Tube furnace set to 0
10/6/2011	12:12:11 PM	Run finished at 12:12 PM
10/6/2011	12:12:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/6/2011	12:16:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	12:16:34 PM	Recipe started at 12:16 PM
10/6/2011	12:16:34 PM	Helium valve closed
10/6/2011	12:16:34 PM	H2 valve closed
10/6/2011	12:16:34 PM	BCl3 valve closed
10/6/2011	12:16:34 PM	PH3 valve closed
10/6/2011	12:16:34 PM	SiCl4 pre valve closed
10/6/2011	12:16:34 PM	SiCl4 post valve closed
10/6/2011	12:16:34 PM	Main Vac valve closed
10/6/2011	12:16:34 PM	Bubbler valve closed
10/6/2011	12:16:34 PM	Bypass valve opened
10/6/2011	12:16:34 PM	Helium MFC set to  0.000000
10/6/2011	12:16:34 PM	H2 MFC set to  0.000000
10/6/2011	12:16:34 PM	BCl3 MFC set to  0.000000
10/6/2011	12:16:34 PM	PHl3 MFC set to  0.000000
10/6/2011	12:16:34 PM	SiCl4 MFC set to  0.000000
10/6/2011	12:16:34 PM	Bypass solenoid MFC set to  0.000000
10/6/2011	12:16:34 PM	Tube furnace set to 0
10/6/2011	12:18:07 PM	Helium valve closed
10/6/2011	12:18:07 PM	H2 valve closed
10/6/2011	12:18:07 PM	BCl3 valve closed
10/6/2011	12:18:07 PM	PH3 valve closed
10/6/2011	12:18:07 PM	SiCl4 pre valve closed
10/6/2011	12:18:07 PM	SiCl4 post valve closed
10/6/2011	12:18:07 PM	Main Vac valve closed
10/6/2011	12:18:07 PM	Bubbler valve closed
10/6/2011	12:18:07 PM	Bypass valve opened
10/6/2011	12:18:07 PM	Helium MFC set to  0.000000
10/6/2011	12:18:07 PM	H2 MFC set to  0.000000
10/6/2011	12:18:07 PM	BCl3 MFC set to  0.000000
10/6/2011	12:18:07 PM	PHl3 MFC set to  0.000000
10/6/2011	12:18:07 PM	SiCl4 MFC set to  0.000000
10/6/2011	12:18:07 PM	Bypass solenoid MFC set to  0.000000
10/6/2011	12:18:08 PM	Tube furnace set to 0
10/6/2011	12:18:33 PM	Helium valve closed
10/6/2011	12:18:33 PM	H2 valve closed
10/6/2011	12:18:33 PM	BCl3 valve closed
10/6/2011	12:18:33 PM	PH3 valve closed
10/6/2011	12:18:33 PM	SiCl4 pre valve closed
10/6/2011	12:18:33 PM	SiCl4 post valve closed
10/6/2011	12:18:33 PM	Bypass valve closed
10/6/2011	12:18:33 PM	Bubbler valve closed
10/6/2011	12:18:33 PM	Main Vac valve opened
10/6/2011	12:18:33 PM	Helium MFC set to  0.000000
10/6/2011	12:18:33 PM	H2 MFC set to  0.000000
10/6/2011	12:18:33 PM	BCl3 MFC set to  0.000000
10/6/2011	12:18:33 PM	PHl3 MFC set to  0.000000
10/6/2011	12:18:33 PM	SiCl4 MFC set to  0.000000
10/6/2011	12:18:33 PM	Bypass solenoid MFC set to  0.000000
10/6/2011	12:18:34 PM	Tube furnace set to 0
10/6/2011	12:18:35 PM	Run finished at 12:18 PM
10/6/2011	12:18:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/6/2011	12:26:04 PM	SiCl4 post valve opened
10/6/2011	12:58:59 PM	Tube furnace set to 140
10/6/2011	12:59:08 PM	SiCl4 post valve closed
10/6/2011	12:59:17 PM	SiCl4 post valve opened
10/6/2011	12:59:53 PM	SiCl4 MFC set to  10.000000
10/6/2011	1:00:15 PM	SiCl4 pre valve opened
10/6/2011	1:01:31 PM	SiCl4 MFC set to  100.000000
10/6/2011	1:02:13 PM	Helium MFC set to  500.000000
10/6/2011	1:02:14 PM	Helium valve opened
10/6/2011	4:38:57 PM	SiCl4 pre valve closed
10/6/2011	4:39:05 PM	Helium valve closed
10/6/2011	4:39:52 PM	Helium valve opened
10/6/2011	4:39:53 PM	SiCl4 pre valve opened
10/6/2011	5:00:53 PM	Main Vac valve closed
10/6/2011	5:00:59 PM	Main Vac valve opened
10/6/2011	5:01:26 PM	Helium valve closed
10/6/2011	5:01:27 PM	SiCl4 pre valve closed
10/6/2011	5:02:02 PM	SiCl4 pre valve opened
10/6/2011	5:02:03 PM	Helium valve opened
10/6/2011	5:07:13 PM	SiCl4 pre valve closed
10/6/2011	5:07:14 PM	Helium valve closed
10/6/2011	5:07:46 PM	SiCl4 post valve closed
10/6/2011	5:07:58 PM	Main Vac valve closed
10/6/2011	5:08:07 PM	Main Vac valve opened
10/6/2011	5:08:07 PM	SiCl4 post valve opened
10/6/2011	5:08:09 PM	SiCl4 pre valve opened
10/6/2011	5:08:10 PM	Helium valve opened
10/6/2011	5:36:31 PM	Helium valve closed
10/6/2011	5:36:33 PM	SiCl4 pre valve closed
10/6/2011	5:37:04 PM	SiCl4 post valve closed
10/6/2011	5:37:15 PM	Main Vac valve closed
10/6/2011	5:37:32 PM	Main Vac valve opened
10/6/2011	5:37:38 PM	SiCl4 post valve opened
10/6/2011	5:37:40 PM	SiCl4 pre valve opened
10/6/2011	5:37:41 PM	Helium valve opened
10/6/2011	5:56:40 PM	Helium valve closed
10/6/2011	5:56:40 PM	SiCl4 pre valve closed
10/6/2011	5:57:18 PM	Main Vac valve closed
10/6/2011	5:57:39 PM	Main Vac valve opened
10/6/2011	5:57:40 PM	Helium valve opened
10/6/2011	5:57:41 PM	SiCl4 pre valve opened
10/6/2011	6:09:38 PM	SiCl4 pre valve closed
10/6/2011	6:09:39 PM	Helium valve closed
10/6/2011	6:10:26 PM	Helium valve opened
10/6/2011	6:10:26 PM	SiCl4 pre valve opened
10/6/2011	10:05:08 PM	Helium valve closed
10/6/2011	10:05:10 PM	SiCl4 pre valve closed
10/6/2011	10:06:41 PM	Tube furnace set to 0
10/6/2011	10:06:58 PM	SiCl4 pre valve opened
10/6/2011	10:06:59 PM	Helium valve opened
10/6/2011	10:07:16 PM	Main Vac valve closed
10/6/2011	10:08:17 PM	Bypass valve opened
10/6/2011	10:08:29 PM	Bypass valve closed
10/6/2011	10:09:16 PM	Bypass valve opened
10/6/2011	10:10:56 PM	Bypass valve closed
10/6/2011	10:10:56 PM	Main Vac valve opened
10/6/2011	10:22:55 PM	Helium valve closed
10/6/2011	10:22:55 PM	SiCl4 pre valve closed
10/6/2011	10:23:39 PM	SiCl4 post valve closed
10/6/2011	10:23:56 PM	SiCl4 post valve opened
10/6/2011	10:24:06 PM	SiCl4 pre valve opened
10/6/2011	10:24:13 PM	Helium valve opened
